| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and high-speed polarization analyzing apparatus and an ellipsometer which has no drive. SOLUTION: A polarizer array has stripe regions in which polarizers have mutually different optical axes. A wavelength plate array has stripe regions, in which retardation is fixed and optical axes are different. The polarizer array and the wavelength plate array are laminated so as to make the stripes in the regions orthogonal. A light-receiving element array is disposed and respectively measures intensity of a light transmitted through a matrix intersection. Alternatively, the polarizer array has the stripe regions, in which the polarizers have different optical axes. The wavelength plate array has the stripe regions, in which the optical axial direction is fixed and phase differences are different; the polarizer array and the wavelength plate array are laminated so as to make the stripes in the regions orthogonal; and the light-receiving element array is disposed and respectively measures intensity of the light transmitted through the matrix intersection. COPYRIGHT: (C)2005,JPO&NCIPI
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