METHOD FOR INTEGRATED NUCLEATION AND BULK FILM DEPOSITION,申请号SG20020005297-传众专利搜索

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发明名称	METHOD FOR INTEGRATED NUCLEATION AND BULK FILM DEPOSITION
摘要
申请公布号	SG109987(A1)	申请公布日期	2005.04.28
申请号	SG20020005297	申请日期	2002.09.03
申请人	CHARTERED SEMICONDUCTOR MANUFACTURING, LTD	发明人	ERISTOFF, GUY;LEE, SARION C.S.;LEONG, LIEW SAN;MENG, GOH KHOON
分类号	H01L21/285;(IPC1-7):C23C16/52;C23C16/24;H01L21/320	主分类号	H01L21/285
代理机构		代理人
主权项
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