发明名称 METHOD AND APPARATUS FOR DEPOSITING SUPERCONDUCTOR MATERIAL ON A TAPE SUBSTRATE
摘要 <p>The invention continuously deposits materials used to grow a superconductor layer onto a moving tape. The invention preferably uses a pay-out reel and take-up reel to respectively dispense and spool the tape substrate at a constant rate. The invention preferably uses a series of stages to form the superconductor layer on the tape, and includes at least one reactor or reaction chamber to deposit one or more materials onto the tape substrate that is used to form the superconductor layer, and one or more chambers to deposit buffer layers between the superconductor and the metal tape substrate or between layers of superconductor, as well as for the deposition of coating layers. The invention also preferably uses transition chambers between the stages to isolate each stage from the other stages.</p>
申请公布号 EP1525627(A2) 申请公布日期 2005.04.27
申请号 EP20030771692 申请日期 2003.07.23
申请人 METAL OXIDE TECHNOLOGIES INC. 发明人 IGNATIEV, ALEX;ZHANG, XIN;ZENG, JIAN, MING;LIU. JIASHU;CHOU, PENCHU;CASTELLANI, LOUIS, D.
分类号 C01G1/00;H01L39/24;C23C16/02;C23C16/40;C23C16/44;C23C16/455;C23C16/54;H01B12/06;H01B13/00;(IPC1-7):H01L39/24 主分类号 C01G1/00
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