| 发明名称 |
CONNECTION PIN |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a connection pin for a probe card for measuring various electric characteristics of a semiconductor device such as an LSI chip. <P>SOLUTION: This connection pin for the probe card for inspecting the semiconductor device has a U-shaped or V-shaped spring part manufactured by etching or press-work of metal. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
| 申请公布号 |
JP2005106482(A) |
申请公布日期 |
2005.04.21 |
| 申请号 |
JP20030336400 |
申请日期 |
2003.09.26 |
| 申请人 |
JAPAN ELECTRONIC MATERIALS CORP |
发明人 |
MORI CHIKAOMI;NAKAJIMA MASANARI |
| 分类号 |
G01R1/073;G01R1/04;G01R1/067;G01R31/02;G01R31/28;H01R12/34;(IPC1-7):G01R1/073;H01R12/32 |
主分类号 |
G01R1/073 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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