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发明名称
摘要
申请公布号
JP2005510865(A)
申请公布日期
2005.04.21
申请号
JP20030548253
申请日期
2002.11.15
申请人
发明人
分类号
G11C11/22;G11C13/02;H01L21/316;H01L21/8246;H01L27/105;H01L27/28;H01L51/05;(IPC1-7):H01L27/10;H01L51/00
主分类号
G11C11/22
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代理人
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