发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device that can be manufactured with a reduced cost by decreasing the number of masks is disclosed, and a method for manufacturing the semiconductor device is disclosed. The method for manufacturing the semiconductor device comprises the steps of: forming a semiconductor layer 3 having a source and a drain regions 10, 11, and LDD regions 16, 17; a gate insulating film 5; and a gate electrode 6; forming a first and a second interlayer insulating films 24, 25 over the gate electrode 6 and the gate insulating film 5; forming contact holes 25 a, 25 c to these interlayer insulating films so as to be located over each of the source region and the drain region; and an opening portion 25 b to these interlayer insulating films so as to be located over the gate electrode and the LDD region; forming a second gate electrode 26 b by a conductive film in the opening portion so as to cover the gate electrode and the LDD region; and a pixel electrode 26 a over the second interlayer insulating film; removing the gate insulating film in the contact hole; and forming wirings 27, 28 connected to each the source region and the drain region.
申请公布号 US2005082537(A1) 申请公布日期 2005.04.21
申请号 US20040963822 申请日期 2004.10.14
申请人 SHARP KABUSHIKI KAISHA 发明人 ARAO TATSUYA;NODA TAKESHI;MATSUO TAKUYA;KITAKADO HIDEHITO;KYOHO MASANORI
分类号 G02F1/1343;G02F1/1368;H01L21/20;H01L21/28;H01L21/336;H01L21/77;H01L21/86;H01L27/12;H01L29/423;H01L29/49;H01L29/786;(IPC1-7):H01L29/04 主分类号 G02F1/1343
代理机构 代理人
主权项
地址