发明名称 |
Optical measurement of device features using lenslet array illumination |
摘要 |
The properties of features formed in a substrate are measured. Lenslet array illumination is used to illuminate regions of a substrate so that the features of interest occupy a greater proportion of the illuminated area. The signal-to-noise ratio of the measurement signal is therefore increased, and the sensitivity of the measurement is thus improved.
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申请公布号 |
US2005083514(A1) |
申请公布日期 |
2005.04.21 |
申请号 |
US20030689241 |
申请日期 |
2003.10.20 |
申请人 |
INFINEON TECHNOLOGIES NORTH AMERICA CORP. |
发明人 |
ZAIDI SYED S.H. |
分类号 |
G01N21/88;G01N21/95;(IPC1-7):G01N21/00 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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