| 发明名称 |
METHOD AND DEVICE FOR DIVIDING SHEET-LIKE WORKPIECE |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To divide a workpiece (34) along a dividing line (36) fully accurately and easily by improving the method and device of dividing a sheet-like workpiece (34) using a pulsed laser beam (78). <P>SOLUTION: The repetitive frequency Y(Hz) of the pulsed laser beam that is emitted to the sheet-like workpiece is set at 200 kHz or above. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
| 申请公布号 |
JP2005095952(A) |
申请公布日期 |
2005.04.14 |
| 申请号 |
JP20030334936 |
申请日期 |
2003.09.26 |
| 申请人 |
DISCO ABRASIVE SYST LTD |
发明人 |
NAGAI YUSUKE;KOBAYASHI MASASHI;MORISHIGE YUKIO |
| 分类号 |
B23K26/00;B23K26/06;B23K26/20;B23K26/40;B23K101/40;H01L21/301;H01S3/10;(IPC1-7):B23K26/00 |
主分类号 |
B23K26/00 |
| 代理机构 |
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代理人 |
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| 地址 |
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