| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular sensor which suppresses degradation of the detection sensitivity, caused by the electrostatic force of the displacement direction generated between movable driving electrodes and fixed driving electrodes, when a vibrator is displaced in response to angular velocity. <P>SOLUTION: Drive signals Va to Vd input into fixed driving electrodes 6a to 6f, 7a to 7f are driven so that steady-state vibration of a vibrator 4 is obtained in X-axis direction. According to the action of the Coriolis force, an angular velocity ωz about Z-axis vibrate the vibrator 4 in Y-axis direction. A displacement-detecting element 22 detects angular velocity ωz through the displacement in the Y-axis direction of the vibrator 4. When the vibrator 4 is displaced in the Y-axis direction, the capacitance between movable driving electrode 4a to 4f and fixed driving electrodes 6a to 6f and the capacitance between movable driving electrode 4a to 4f and fixed driving electrodes 7a to 7f are made to be unbalanced so that the net electrostatic force generated in the Y-axis direction is eliminated or reduced by an amplitude control device 3 which distributes signal intensity, according to the amount of displacement in Y-axis direction of the vibrator 4 between the driving signal Va and driving signal Vb and between drive signal Vc and drive signal Vd. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
