| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate-treating device for improving operability in a conveyance teaching processing. SOLUTION: When, for example, auto teaching processing for teaching an accurate conveyance position at a substrate transfer target is made to a conveyance robot TR1 in a bark block 2, the conveyance robot TR1 accesses successively from the substrate transfer target that can be subjected to auto teaching when processing start is inputted for executing auto teaching processing. Normally, auto teaching processing is executed successively from the substrate transfer target other than a bake unit, and the temperature of the bake unit is lowered to a specified temperature or lower for performing auto teaching processing. Then, the auto teaching processing of the bake unit whose temperature is lower to a specified temperature or lower is executed. When it is completed, the lowered temperature of the bake unit is returned to the original temperature before the temperature is lowered. COPYRIGHT: (C)2005,JPO&NCIPI
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