METHOD FOR PREPARING A SAMPLE FOR ELECTRON MICROSCOPE EXAMINATION AND A SAMPLE CARRIER AND TRANSPORT HOLDER USED THEREFOR

摘要

The invention relates to a method for preparing a sample for electronic microscope examination, in particular with a transmission electron microscope (TEM) consisting in a) placing a sample-containing substrate (10) in a vacuum chamber (32) for the preparation thereof, b) applying a protective coating (21) to the sample carrier surface, c) separating the sample covered by said protective coating (21) which is used as a mask from the substrate (10) by an ion-beam, and d) in removing said separated sample (12) from the substrate (10) towards the vacuum chamber (32).