SYSTEM AND METHOD FOR MANAGING TOTAL AVERAGE CYCLE TIME OF ROBOT

摘要

A system and a method for managing a total average cycle time of robot are provided to increase a transaction amount of a robot neck processing using a maximum movement time among process steps as a total average cycle time of robot. A plurality of process steps is transacted by a process unit. A wafer is loaded and unloaded from the process unit by a robot. Each work time among process steps according to a loading and unloading by robot is detected, a scheduler manages a total average cycle time of robot by adding totally each work time.