发明名称 THIN FILM SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 <p><P>PROBLEM TO BE SOLVED: To reduce the aspect ratio of a contact hole formed in an insulating layer in the forming region of a transfer device, in a substrate on which two kinds of semiconductor devices of the transfer device and a film forming device are formed in a mixed state. <P>SOLUTION: In the forming region of a single crystal Si thin film transistor 11, a relay pad 33 is formed at a predetermined place in the insulating layer thereof. Connecting wirings penetrating the insulating layer are formed as connecting wirings 34, 35 through the relay pad 33. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005093757(A) 申请公布日期 2005.04.07
申请号 JP20030325781 申请日期 2003.09.18
申请人 SHARP CORP 发明人 TAKATO YUTAKA;ITOGA TAKASHI;OGAWA YASUYUKI
分类号 H01L23/522;H01L21/02;H01L21/336;H01L21/762;H01L21/768;H01L21/77;H01L21/84;H01L23/52;H01L27/12;H01L29/786;(IPC1-7):H01L27/12 主分类号 H01L23/522
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