发明名称 |
METHOD AND SYSTEM FOR AUTOMATIC TARGET FINDING |
摘要 |
A method and system are presented for automatic target finding by using two imaging channels with relatively low and high magnifications, using the low magnification channel (relatively large field of view) for finding a region of interest (i.e., that of the targets location within the field), scanning this zone by grabbing images via the high magnification channel (relatively small field of view) and marking the overlay targets using image processing algorithms. |
申请公布号 |
WO2004113932(A3) |
申请公布日期 |
2005.03.31 |
申请号 |
WO2004IL00525 |
申请日期 |
2004.06.17 |
申请人 |
NOVA MEASURING INSTRUMENTS LTD.;FINAROV, MOSHE;HOLCMAN, IDO |
发明人 |
FINAROV, MOSHE;HOLCMAN, IDO |
分类号 |
G01B11/00;G01R;G02B;G03B27/00;G03B27/42;G06K9/00 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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