SCANNING PROBE MICROSCOPE

摘要

A scanning probe microscope detects or induces changes in a probe-sample interaction. In imaging mode, the probe (54) is brought into a contact distance of the sample (12) and the strength of the interaction measured as the probe (54) and sample surface are scanned relative to each other. Image collection is rapidly performed by carrying out a relative translation of the sample (12) and probe (54) whilst one or other is oscillated at or near its resonant frequency. In a preferred embodiment the interaction is monitored by means of capacitance developed at an interface between a metallic probe and the sample. In lithographic mode, an atomic force microscope is adapted to write information to a sample surface.