| 摘要 |
A method for coating substrates includes providing at least one processing chamber and disposing the processing chamber between a first load lock and a second load lock, the second load lock disposed lower than the first load lock. The method further includes isolating the processing chamber from the first load lock, isolating the processing chamber from the second load lock, and providing at least one track through the processing chamber and the first and second load locks and structuring and arranging the track such that an article slides thereon under the force of gravity.
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