| 发明名称 |
Object inspection and/or modification system and method |
| 摘要 |
A scanning probe microscope system (100) includes an objective lens (147), a clamping circuit (404), a tip deflection measurement circuit (421), a cantilever (136), and a probe (137) for modifying and inspecting an object (102) disposed on a stage (129).
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| 申请公布号 |
US2005056783(A1) |
申请公布日期 |
2005.03.17 |
| 申请号 |
US20040875151 |
申请日期 |
2004.06.22 |
| 申请人 |
GENERAL NANOTECHNOLOGY, LLC |
发明人 |
KLEY VICTOR B. |
| 分类号 |
B82B3/00;G01N23/00;G01Q20/02;G01Q70/02;G01Q80/00;G21K7/00;H01J37/26;H01L21/00;(IPC1-7):G21K7/00 |
主分类号 |
B82B3/00 |
| 代理机构 |
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代理人 |
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| 地址 |
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