Multilayered ceramic substrate and production method therefor

摘要

In a ceramic green-sheet stack (1) to be fired to form a multilayered ceramic substrate having a cavity, a shrinkage-reducing pad (9) is formed along a boundary interface between first ceramic green sheets (7) having an opening (6) for defining a cavity (5), and second ceramic green sheets (8) having no opening. The shrinkage-reducing pad (9) is exposed on the entire periphery of the inner peripheral surface of the cavity (6) at the bottom end of the inner peripheral surface. The shrinkage-reducing pad (9) contains a glass component, and serves to reduce shrinkage stress produced at the boundary interface between the first and second ceramic green sheets (7, 8) during the firing process.