| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser microscope of a compact structure which is low in manufacturing cost. SOLUTION: The laser beam generated from a semiconductor laser (1) is converted into a line-like beam having divergence in one direction by a micromirror apparatus (5). The micromirror apparatus (5) has a plurality of micromirrors arranged in a two-dimensional array form and the respective micromirrors are vibrated at a high speed by driving pulses. Since the micromirrors are freely movably supported by hinges, the mirror surfaces are displaced to a curved surface shape by the electrostatic attraction generated by the driving pulses. The respective micromirrors are acted similarly to cylindrical mirrors by the displacement of the curved surface shape to convert the incident laser beam to a non-coherent light beam diverging in one direction. The divergent beam is projected through a beam deflector (12) and an objective lens (15) to a sample and the reflected light from the sample is made incident on a linear image sensor (19). The micromirror apparatus is relatively inexpensive and makes a relatively large divergence angle obtainable and therefore the laser microscope of the compact structure which is low in the manufacturing cost can be realized. COPYRIGHT: (C)2005,JPO&NCIPI
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