发明名称 PROCESS OF MANUFACTURE OF ELECTRON EMITTING ELEMENT, ELECTRON SOURCE, AND IMAGE FORMING APPARATUS
摘要 <p><P>PROBLEM TO BE SOLVED: To simplify a manufacturing process of an electron emitting element, and to provide a manufacturing method of an image forming device whereby the image forming device having excellent display quality for a long time can be inexpensively manufactured. <P>SOLUTION: This manufacturing method of the electron emitting element has a process A to form a high polymer membrane 6" on a substrate 1, a process B to selectively reduce the resistance of a region irradiate by an energy beam by irradiating the energy beam onto the partial region of the high polymer membrane 6", a process C to form the high polymer membrane including the region having the selectively reduced resistance into a desired shape by patterning so that at least a part of the region having the selectively reduced resistance remains, and a process D to form a gap 5' in the region having the reduced resistance. In addition, the image forming device composed of an electron source in which a plurality of the electron emitting elements manufactured by this manufacturing method are disposed, and an image forming member to form an image by irradiation of electrons emitted from the electron source is manufactured. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005063779(A) 申请公布日期 2005.03.10
申请号 JP20030291161 申请日期 2003.08.11
申请人 CANON INC 发明人 MIYAZAKI KAZUYA;MIZUNO SUKENOBU;SHIMAZU AKIRA
分类号 H01J9/02;(IPC1-7):H01J9/02 主分类号 H01J9/02
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