WET STATION WITH CASSETTE TRANSFER APPARATUS TO REDUCE NUMBER OF THE CASSETTE TRANSFER APPARATUS AND METHOD FOR OPERATING THE SAME

摘要

PURPOSE: A wet station with a cassette transfer apparatus and a method for operating the same are provided to reduce the number of the cassette transfer apparatus by introducing a second taking-in unit. CONSTITUTION: A wet station with a cassette transfer apparatus includes a first taking-in unit(120), a second taking-in unit(160). The first taking-in unit transfers a cassette(910,920) containing a plurality of wafer to a first position(111) by a translational movement. The second taking-in unit transfers the cassette moved to the first position to a second position(112) by a rotating movement, the cassette moved to the second position is transferred to a third position(113) by the translational movement. The plurality of wafers transferred to the second position is separated from the cassette. A wet station dips the plurality of wafers separated from the cassette into a cleaning vessel.