| 摘要 |
<p>A method for polarization treatment of a piezoelectric/electrostrictive film type chip, comprising: providing a piezoelectric/electrostrictive film type chip (20) with a plurality of piezoelectric/electro-strictive film type elements each having a piezoelectric/electrostrictive section constituted by a thin diaphragm, a lower electrode formed on the diaphragm, a piezoelectric/electrostrictive layer formed on the lower electrode, and an upper electrode formed on the piezoelectric/electrostrictive layer, dividing the plurality of piezoelectric/electrostrictive film type elements into two or more element groups (25a,b,c) and subjecting the element groups to polarization treatment independently. The chip after the treatment is low in dielectric breakdown and can be used as a reliable piezoelectric/electrostrictive film type chip. <IMAGE></p> |
