| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of scheduling one or more maintenance works, in at least a part of a substrate treatment system. SOLUTION: According to an embodiment, the method includes a step of determining a gap in the flow of substrates in a part of the substrate treatment system, or a step of forming the gap in an optimal point within the flow of substrates in a part of the substrate treatment system, or both the steps above, and a step of scheduling one or more maintenance works to be performed in another part of substrate treatment during a period associated with the gap. An increase in the productivity of substrate treatment can be achieved by reduction in downtime in the substrate treatment system by appropriately scheduling the maintenance works. Or it can be achieved by the execution of extra maintenance works, which can be executed, without reducing productivity so much; and/or the maintenance can be planned at the moment of being optimized, so as to give a proper influence to the overall yield. COPYRIGHT: (C)2005,JPO&NCIPI
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