<p>A fault handling algorithm processes a plurality of fault status signals from a sputtering system in a period of time to generate at least one command signal for affecting the operation of a power generator.</p>
申请公布号
WO2005019495(A2)
申请公布日期
2005.03.03
申请号
WO2004US26684
申请日期
2004.08.18
申请人
ENI TECHNOLOGY, INC.;TRACY, MARK, D.;KLEIN, JESSE, N.
