Fabrication method of stamper for optical information recording medium, master disk of stamper for optical information recording medium

摘要

Fabrication method of a stamper for an optical recording medium including the following steps: a step of changing crystal states of the specific portion (104) of a resist layer (103) of a master disk having an etching layer (102) and the resist layer (103) formed on the etching layer through exposure, a step of removing the specific portion (104), a step of removing the portion of the etching layer (102) overlapping the removed portion of the resist layer (103), a step of forming a conductive film (105) from which the resist layer is removed, a step of performing electroforming by using the conductive film as an electrode, and a step of exfoliating the etching layer (102) from the conductive film (105).