发明名称 Device for detecting three-dimensional electromagnetic radiation and method for making same
摘要 A device for detecting electromagnetic radiation including at least one detection circuit including a non-cooled thermal detector and an associated reading circuit, and a method for producing the device. The device includes a substrate forming a cavity under vacuum, in which are placed the thermal detector and the reading circuit. A window transparent to radiation is placed above the cavity and ensures the sealing of the cavity. A sealing mechanism hermetically attaches the window on the substrate, and an electrical connection is inserted in the window ensuring a leaktight connection between the detection circuit and processing elements outside the cavity.
申请公布号 US6861719(B2) 申请公布日期 2005.03.01
申请号 US20030399866 申请日期 2003.04.29
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 OUVRIER-BUFFET JEAN-LOUIS;BISOTTO SYLVETTE;CAPLET STEPHANE
分类号 H01L21/60;H01L31/0203;(IPC1-7):H01L21/00 主分类号 H01L21/60
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