SEMICONDUCTOR FABRICATING APPARATUS HAVING ROTARY ELEVATOR TYPE CARRIER STOCKER TO REDUCE TEACHING TIME

摘要

PURPOSE: A semiconductor fabricating apparatus having a rotary elevator type carrier stocker is provided to reduce a teaching time by reducing a drive range of a carrier transfer. CONSTITUTION: A carrier input/output unit(1000) inputs and outputs a carrier including a wafer. A carrier transfer(1300) is used for moving the carrier by a carrier transfer arm. A carrier stocker(1500) is moved to upper, lower, left, and right directions in order to stock the carrier from the carrier transfer by the carrier transfer arm. A wafer extraction unit(1700) extracts the wafer from the carrier stocked in the wafer stocker. A wafer processing unit(1900) loads the wafer extraction unit.