| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a CMP pad conditioner having long life for efficiently conditioning a grinding pad. <P>SOLUTION: The CMP pad conditioner 50 is equipped with a bar 52 whose end is turnably installed on a specified fixture, a conditioning disk holder mounting part 54 formed on the one side of the bar 52, a conditioning disk holder 56 mounted to the conditioning disk holder mounting part 54, and a conditioning disk 58 which an area divided by the size of a grinding grain is partitioned on the surface mounted to the conditioning disk holder 56. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
