| 发明名称 |
Site-specific method for large area uniform thickness plan view transmission electron microscopy sample preparation |
| 摘要 |
A method for preparing a sample includes separating a portion of substrate from a sample, performing focused ion beam milling, and removing additional sample material using an etchant.
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| 申请公布号 |
US2005037625(A1) |
申请公布日期 |
2005.02.17 |
| 申请号 |
US20030639330 |
申请日期 |
2003.08.12 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
ANCISO ADOLFO;JONES PATRICK J.;IRWIN RICHARD B. |
| 分类号 |
G01N1/32;H01J37/305;H01L21/302;H01L21/461;(IPC1-7):H01L21/302 |
主分类号 |
G01N1/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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