STYLUS TIP FOR WORKPIECE CONTACTING PROBE

摘要

A stylus (12) for a workpiece contacting probe has a tip (14) which comprises a self-lubricating or low friction material, in order to inhibit debris generation or adhesive wear (pick up) as the tip scans a workpiece surface. Various materials are described, including composites having a solid state lubricant incorporated into a dimensionally stable microstructure. The tip (14) may be made entirely of such a composite, or may have a substrate (30) with a coating (32) of the self-lubricating or low friction material. Suitable materials are silicon carbide or silicon nitride containing free graphite hexagonal boron nitride, molybdenium sulphide or metallic tin, furthermore silicon carbide/nitrite impregnated with PTFE, or annealed boron carbide.