METHOD AND EQUIPMENT FOR MANUFACTURING CERAMICS, AND SEMICONDUCTOR DEVICE AND PIEZOELECTRIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method, in which ceramics having improved characteristics such as crystallinity can be obtained, while lowering the process temperature, and to provide ceramics manufacturing equipment.

SOLUTION: The method for manufacturing ceramics includes a step of depositing a ceramic film, while feeding activated species 100A to be at least one of raw materials and also feeding electromagnetic waves 200A to the prescribed region. A film, consisting of the substance to be one of the raw materials for ceramics, may be previously formed in the prescribed region. Further, the method includes a step of feeding the activated species 100A and the electromagnetic waves 200A on the first formed ceramic film 20a, to deposit a second ceramic film which is of different crystal structure from the first ceramic film 20a.

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