Cryogenic refrigerator

摘要

A cryogenic refrigerator includes a first refrigerant tube and a second refrigerant tube each comprising two tubes that are arranged on a cooling stage substantially parallel to each other and communicate with each other through a gas passage formed in the cooling stage. Phase differences are provided to oscillating gas pressures in the first and second refrigerant tubes, to cancel vibration of the cooling stage. Thus, the cryogenic refrigerator can be provided which can effectively reduce the vibration of the cooling stage caused by the oscillating gas pressure and can reduce the size thereof.