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发明名称
Halbleitervorrichtungs-Herstellungsverfahren und Beschleunigungssensor
摘要
申请公布号
DE10392426(T5)
申请公布日期
2005.02.10
申请号
DE20031092426T
申请日期
2003.01.29
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO
发明人
OKUMURA, MIKA;HORIKAWA, MAKIO;SATOU, KIMITOSHI
分类号
B81B3/00;G01P15/08;G01P15/125;H01L21/28;H01L29/84;(IPC1-7):H01L29/84
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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