OPTICAL MODULE, METHOD OF RELEASING THERMAL STRESS OF OPTICAL MODULE, AND OPTICAL SUBSTRATE FOR OPTICAL MODULE

摘要

PROBLEM TO BE SOLVED: To improve durability by suppressing the lowering of performance of an optical module due to a change of temperature of a use environment to maintain reliability and avoiding any damage of the optical module. SOLUTION: The optical module is provided with an Si substrate 11, and an optical component such as a first collimator lens 21 and a second collimator lens 23 mounted on the Si substrate 11. A recess such as a trapezoid-shaped groove 12 carrying the optical component on one face, and recesses such as V-shaped grooves 31a and 31b and trapezoid-shaped grooves 32a and 32b releasing stress in the optical component and the substrate on the other face are formed on the Si substrate 11. COPYRIGHT: (C)2005,JPO&NCIPI