| 摘要 |
PROBLEM TO BE SOLVED: To provide an operation method of a high power pulsed laser device, which may prevent damages on the optical parts such as a laser medium and a mirror caused by drastic thermal changes or optical inputs, and thus may improve the reliability. SOLUTION: In the operation method of a high power pulsed laser device, a flow rate of cooling water supplied from a cooling system 13 to an oscillator 6 and amplifiers 8 is gradually increased to gradually increase the value of the current supplied to a stimulation power source 2 of the oscillator 6, in a state where the laser beams are blocked by a shutter 14 in a transmitter 7. Further, when the output of the laser beams has reached the rated output, the turn angle of a half-wave length plate 15 is changed, while releasing the blocking of the laser beams, to turn the polarization direction of the laser beams. Then, the transmittance of the laser beams that transmits through a polarized beam splitter 16 is gradually increased from the minimum to the maximum to direct the laser beams to the individual amplifiers 8, and to gradually increase the stimulation current supplied to the individual amplifiers 8, from the required value lower than the rated current value. COPYRIGHT: (C)2005,JPO&NCIPI |
