| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump which is consistently operated when reactive gas is evacuated. SOLUTION: In the axial flow vacuum pump having a substantially cylindrical casing 101 and substantially columnar rotors 102 which are disposed in the casing in a substantially concentric manner, a trap chamber 118 to collect by-product is formed inside thereof. By-product in evacuating reactive gas is collected in the trap chamber, and the pump is consistently operated. COPYRIGHT: (C)2005,JPO&NCIPI
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