SCANNING-TYPE PROBE MICROSCOPE

摘要

A scanning-type probe microscope easily usable even in a severe environment. An optical fiber (32) irradiates light from a laser diode (31) toward the surface of a cantilever (1). The irradiated light is collected by a lens (33) and irradiated to the surface of the cantilever (1). The light reflected by the surface of the cantilever (1) is collected by lenses (411, 412) and inputted into optical fibers (421, 422). The light passed through the optical fibers (421, 422) is received by photodiodes (431, 432). The inclination of the cantilever (1) is detected based on variation in the amount of light received.