| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a suction pad device which smoothly sucks and hold a plate material having a large number of small holes. <P>SOLUTION: A negative pressure chamber (3) is formed in a pad case (2), and a connecting port (11) to be connected to an air suction source side is provided on the upper side of the negative pressure chamber (3), and a large number of suction ports (9) are provided on the lower surface side of the pad case (2) so as to be uniformly distributed, and valve chambers (6a) are provided between the suction ports (9) and the negative pressure chamber (3). In addition, the upper portions of the valve chambers (6a) are communicated with the negative pressure chamber (3) via small diameter valve holes (6b), and the lower portions of the valve chambers (6a) are communicated with the upper portion side of the suction ports (9) via the small diameter holes, and solid valve elements (7) to close the upper valve holes (6b) are received in the valve chambers (6a) with a required clearance so as to move upward and downward. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
