发明名称 |
Production of a layer made from ferroelectric material used in the production of a ferroelectric capacitor comprises roughening a ferroelectric material layer on a surface and applying an electrode to the roughened surface |
摘要 |
<p>Production of a layer made from ferroelectric material with electrodes (1) comprises roughening a layer (7) of ferroelectric material on a surface and applying an electrode to the roughened surface or roughening a surface of an electrode and depositing a layer of ferroelectric material on the roughened surface. An independent claim is also included for a layer of ferroelectric material with an applied electrode.</p> |
申请公布号 |
DE10330535(A1) |
申请公布日期 |
2005.02.03 |
申请号 |
DE2003130535 |
申请日期 |
2003.07.07 |
申请人 |
FORSCHUNGSZENTRUM JUELICH GMBH |
发明人 |
KOHLSTEDT, HERMANN |
分类号 |
H01L21/02;H01L21/8242;(IPC1-7):H01L21/823;H01L21/314 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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