发明名称 Production of a layer made from ferroelectric material used in the production of a ferroelectric capacitor comprises roughening a ferroelectric material layer on a surface and applying an electrode to the roughened surface
摘要 <p>Production of a layer made from ferroelectric material with electrodes (1) comprises roughening a layer (7) of ferroelectric material on a surface and applying an electrode to the roughened surface or roughening a surface of an electrode and depositing a layer of ferroelectric material on the roughened surface. An independent claim is also included for a layer of ferroelectric material with an applied electrode.</p>
申请公布号 DE10330535(A1) 申请公布日期 2005.02.03
申请号 DE2003130535 申请日期 2003.07.07
申请人 FORSCHUNGSZENTRUM JUELICH GMBH 发明人 KOHLSTEDT, HERMANN
分类号 H01L21/02;H01L21/8242;(IPC1-7):H01L21/823;H01L21/314 主分类号 H01L21/02
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