| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming an inorganic thin film on a polyimide resin to form an inorganic thin film on the surface of a polyimide resin in high adhesion reliability and pattern precision. SOLUTION: The inorganic thin film is formed on the surface of a polyimide resin by (1) applying an alkaline alcoholic aqueous solution to the polyimide resin at the part for forming the inorganic thin film, dissolving a part of the polyimide resin surface to form a pit and cleaving the imide ring of the polyimide resin near the pit to form carboxy group, (2) bringing the polyimide resin having carboxy group into contact with a solution containing metal ion to form a metal salt of carboxy group and (3) depositing the metal salt on the surface of the polyimide resin in the form of metal, metal oxide or semiconductor. COPYRIGHT: (C)2005,JPO&NCIPI |
