发明名称 Apparatus and method for processing electronic components
摘要 The invention relates to an apparatus for processing electronic components, such as semi-conductor products, comprising at least two processing stations, at least one supply/discharge position for electronic components, a robot arm with engaging means for engaging the electronic components for displacing electronic components between the supply/discharge position and the processing stations, and a control for actuating the robot arm and the processing stations. The invention also relates to an assembly of at least two such apparatuses and to a method for processing electronic components which can be performed by means of the apparatus according to the invention.
申请公布号 US6848174(B2) 申请公布日期 2005.02.01
申请号 US20020204518 申请日期 2002.12.06
申请人 FICO B.V. 发明人 VENROOIJ JOHANNES LAMBERTUS GERARDUS MARIA;VERKUIJLEN ADRIANUS HENRICUS IGNATIUS MARIA
分类号 H01L21/56;H01L21/00;H01L21/687;(IPC1-7):H05K3/30;B23P23/00 主分类号 H01L21/56
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