RESIDUAL GAS ANALYZING APPARATUS OF SEMICONDUCTOR MANUFACTURING EQUIPMENT FOR REMOVING UNNECESSARY MAN-HOUR LOSS AND PROLONGING LIFETIME OF HEATER FILAMENT

摘要

PURPOSE: A residual gas analyzing apparatus of semiconductor manufacturing equipment is provided to suppress an unnecessary man-hour loss and to prolong the lifetime of a heater filament by driving a heater of the residual gas analyzing apparatus interdependent on a heater driving signal of a process chamber. CONSTITUTION: A residual gas analyzing apparatus includes a heater and relay. The heater(92) includes a filament. The relay is used for supplying selectively power supply to the heater according to a heater on/off signal of a process chamber. The relay supplies power supply to the heater in a heater on signal state of the process chamber.