CARBON NANOTUBE MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING CARBON NANOTUBE

摘要

A carbon nanotube manufacturing apparatus (1000, 2000, 3000) comprises an ionizing means (e.g. a negative ion generator (10)) for ionizing a vapor of a certain carbon-containing compound, an electric field generating means (e.g. a direct-current power supply (21), a cathode (22) and an anode (23)) for generating an electric field and a heating means (e.g. a high-frequency heat er (30)) for heating a growth substrate (50, 55) disposed within the electric field generated by the electric field generating means. A carbon nanotube manufacturing method in which an ionized vapor of the carbon-containing compound is passed through the electric field and brought into contact with the heated growth substrate, so that a carbon nanotube (4) is orientationall y grown on the growth substrate is adopted.