| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing an optical circuit that make it easy to accurately adjust a refractive index variation quantity, the size of a refractive index variation area, and the shape of the refractive index variation area. SOLUTION: While an inner side of a substrate 100 is irradiated with laser light 1 from a laser light source through a condenser lens 13 and a scanning stage 11 is moved to move the position of the light convergence point in the substrate 100 in a scan moving direction, a stage 12 for high-precision adjustment is moved to reciprocally move the position of the light convergence point in the substrate 100 in the incidence direction of the laser light 1 and a direction orthogonal to the scan moving direction, and thus the refractive index in the substrate 100 in the circumference of the light convergence point of the laser light 1 is varied to form a waveguide. COPYRIGHT: (C)2005,JPO&NCIPI |
