发明名称 Semiconductor component contact system - using double metal layers and differential annealing/bonding
摘要 <p>Semiconductor components, esp. of Ge, have one face at least covered with an insulating film leaving windolws for the application of contacts. a first layer of metallising esp. of Ag 400-800 angstroms thick, is deposited overall by evaporation followed by a second layer of esp. of Sb 50-150 angstroms thick at 150-250 degrees C. The whole is then annealed at 380-520 degrees C. at which allowing does not take place, for 5-15 mins. in a protective atmosphere. a good bond is formed between the Ge and the Ag without any barrier layer but the Ag-Sb sandwich is easily peeled off from the insulation film. A further metallising layer of Au may follow the Sb layer. Intermediate masking processes, with risk of contamination are avoided.</p>
申请公布号 DE2028491(A1) 申请公布日期 1971.12.23
申请号 DE19702028491 申请日期 1970.06.10
申请人 LICENTIA GMBH 发明人
分类号 H01L21/00;H01L23/485;(IPC1-7):01L7/56 主分类号 H01L21/00
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