PLASMA TREATMENT METHOD AND PLASMA TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a plasma treatment method hardly degrading plasma treatment capability.

SOLUTION: This plasma treatment device has a plurality of electrodes 1 and 2 disposed oppositely to each other, and a gas passage 36, and generates plasma 3 in the gas passage 36 under pressure in the vicinity of atmospheric pressure by introducing a gas into the gas passage 36 and by applying a voltage between the electrodes 1 and 2 opposite to each other. This application is also related to this plasma treatment method for emitting the plasma 3 from the gas passage 36 to supply it to a surface of a treatment object 4. The emission direction of the plasma 3 is tilted toward the transfer direction of the treatment object 4. Air can be collected and supplied to a spraying position of the plasma 3 by sucking the air around the treatment object 4 into the flow of the plasma 3.

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