Method of stabilizing laser beam, and laser beam generation system

摘要

A laser beam generation system comprises a solid state laser oscillator excited by an excitation beam, and a Q switch for pulsating laser oscillation by use of a saturable absorber, wherein the optical path length of a laser resonator is variable. The pulse of a laser beam generated from the laser beam generation system is detected, and variation of the optical path length of the laser resonator is controlled based on a characteristic of the detected pulse, to thereby stabilize the laser beam. The laser beam generation system may further comprise resonator length regulation element for varying the optical path length of the laser resonator, and detection element for detecting the pulse laser beam outputted, wherein the optical path length of the laser resonator is regulated by the resonator length regulation element based on a characteristic of the pulse detected by the detection element.