| 摘要 |
PROBLEM TO BE SOLVED: To reduce the production cost by growing a large diameter single crystal. SOLUTION: The infrared heating single crystal manufacturing apparatus is equipped with an upper shaft 1 to which a raw material rod S is attached, a lower shaft 2 to which the single crystal C is attached, and a light source unit for heating a part to be heated, being a part where the raw material rod S and the single crystal C are joined, by condensed infrared rays L2. In the apparatus, a floating molten zone F is formed by heating and melting the part to be heated, and the single crystal C is grown. Further, in the apparatus, the light source unit is constituted of an infrared lamp and a rotating ellipsoidal mirror for condensing infrared rays irradiated from the infrared lamp, and one end parts of a plurality of optical fibers 4 having a lens for suppressing scattering of the emitted light are arranged at the periphery of the part to be heated, and the other end parts of the optical fibers 4 are connected to an infrared ray condensing section of the light source unit. COPYRIGHT: (C)2005,JPO&NCIPI
|
