TRANSPORTATION APPARATUS AND DRIVE MECHANISM

摘要

A transportation apparatus (20) for a substrate (W) to be treated includes a rotatable base (24). Bendable/stretchable first and second arm mechanisms (26, 28) are installed on the rotatable base. The first and second arm mechanisms respectively have, in that order from the rotatable base side, base end arms (26A, 28A), intermediate arms (26B, 28B), and picks (26C, 28C) that are pivotably connected to each other. The picks are arranged so as to support the substrate to be treated. A link mechanism (30) is connected to the base end arms of the first and second arm mechanisms so as to drive the first and second arm mechanisms. A first drive source (32) for driving and rotating the rotatable base is provided. A second drive source (34) for driving the link mechanism so as to bend and stretch the first and second arm mechanisms is provided.