| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to heighten the intensity of a beam containing soft X rays as excitation laser light and a higher-order harmonics wave, and eliminate the fear of the deformation of the profile of an extracted soft X-ray beam when the soft X rays are extracted from the beam containing them as the excitation laser light and the higher-order harmonics wave. SOLUTION: In the method of separating the soft X rays which separates them from the beam that is generated through the generation of a higher harmonics wave using excitation laser light of a prescribed wavelength and contains them as the excitation laser light and the higher-order harmonics wave, the beam containing the soft X rays as the excitation laser light and the higher-order harmonics wave is made incident on a silicon substrate, a silicon carbide substrate or a molybdenum substrate so that the incidence angle of the beam can be a Brewster angle to a prescribed wavelength and the ingredient of the soft X rays in the beam is reflected and that of the prescribed wavelength is transmitted or absorbed by the silicon substrate, the silicon carbide substrate or the molybdenum substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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